Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Edited by:
Stefan Landis Imprint: ISTE Ltd and John Wiley & Sons Inc Country of Publication: United Kingdom Dimensions:
Height: 241mm,
Width: 163mm,
Spine: 29mm
Weight: 730g ISBN:9781848212022 ISBN 10: 184821202X Pages: 320 Publication Date:13 December 2010 Audience:
Professional and scholarly
,
Undergraduate
Format:Hardback Publisher's Status: Active
Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.