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Lithography

Stefan Landis

$316.95

Hardback

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English
ISTE Ltd and John Wiley & Sons Inc
13 December 2010
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Edited by:  
Imprint:   ISTE Ltd and John Wiley & Sons Inc
Country of Publication:   United Kingdom
Dimensions:   Height: 241mm,  Width: 163mm,  Spine: 29mm
Weight:   730g
ISBN:   9781848212022
ISBN 10:   184821202X
Pages:   320
Publication Date:  
Audience:   Professional and scholarly ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

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