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Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers by Imin Kao at Abbey's Bookshop,
Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
— —
Imin Kao Chunhui Chung

Wafer Manufacturing

Shaping of Single Crystal Silicon Wafers

Imin Kao,  Chunhui Chung

$217.95

Hardback

Not in-store but you can order this
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English
John Wiley & Sons Inc
29 January 2021
Semi-conductors & super-conductors
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.  The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
By:   ,
Imprint:   John Wiley & Sons Inc
Country of Publication:   United States
Dimensions:   Height: 244mm,  Width: 168mm,  Spine: 22mm
Weight:   680g
ISBN:   9780470061213
ISBN 10:   0470061219
Pages:   304
Publication Date:  
Audience:   Professional and scholarly ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS. Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.

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