Stress and Strain Engineering at Nanoscale in Semiconductor Devices

Chinmay K. Maiti (SOA University Bhubaneswar, Odisha, India)

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English

CRC Press
25 September 2023

Nanotechnology; Electrical engineering; Circuits & components; Environmental science, engineering & technology

Anticipating a limit to the continuous miniaturization (More-Moore), intense research efforts are being made to co-integrate various functionalities (More-than-Moore) in a single chip. Currently, strain engineering is the main technique used to enhance the performance of advanced semiconductor devices. Written from an engineering applications standpoint, this book encompasses broad areas of semiconductor devices involving the design, simulation, and analysis of Si, heterostructure silicongermanium (SiGe), and III-N compound semiconductor devices. The book provides the background and physical insight needed to understand the new and future developments in the technology CAD (TCAD) design at the nanoscale.

Features

Covers stressstrain engineering in semiconductor devices, such as FinFETs and III-V Nitride-based devices

Includes comprehensive mobility model for strained substrates in global and local strain techniques and their implementation in device simulations

Explains the development of strain/stress relationships and their effects on the band structures of strained substrates

Uses design of experiments to find the optimum process conditions

Illustrates the use of TCAD for modeling strain-engineered FinFETs for DC and AC performance predictions

This book is for graduate students and researchers studying solid-state devices and materials, microelectronics, systems and controls, power electronics, nanomaterials, and electronic materials and devices.

By: Chinmay K. Maiti (SOA University Bhubaneswar Odisha India)
Imprint: CRC Press
Country of Publication: United Kingdom
Dimensions: Height: 234mm, Width: 156mm,
Weight: 220g
ISBN: 9780367519339
ISBN 10: 036751933X
Pages: 260
Publication Date: 25 September 2023
Audience: College/higher education , General/trade , Primary , ELT Advanced
Format: Paperback
Publisher's Status: Active

"Professor Chinmay K. Maiti, PhD is an Ex-Professor and Ex-Head of Department from Indian Institute of Technology (IIT) – Kharagpur, India. He then joined the SOA University, Bhubaneswar in May 2015 as a Professor, where he is now on a Visiting Assignment. He is interested in strain-engineering in nanodevices, flexible electronics, and semiconductor device/process simulation research, and microelectronics education. He has published several monographs in Silicon-Germanium, heterostructure-Silicon, and Technology CAD areas. He has edited the ""Selected Works of Professor Herbert Kroemer"", World Scientific, Singapore, 2008."