Spectroscopic Techniques For Semiconductor Industry

Vladimir Protopopov (Samsung Electronics Mechatronics Center, South Korea)

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English

World Scientific Publishing Co Pte Ltd
27 December 2022

Light (optics); Spectrum analysis, spectrochemistry, mass spectrometry; Semi-conductors & super-conductors

Summary
Details

The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing.

Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers.

Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas.

By: Vladimir Protopopov (Samsung Electronics Mechatronics Center South Korea)
Imprint: World Scientific Publishing Co Pte Ltd
Country of Publication: Singapore
ISBN: 9789811257599
ISBN 10: 9811257590
Pages: 324
Publication Date: 27 December 2022
Audience: College/higher education , Professional and scholarly , Primary , Undergraduate
Format: Hardback
Publisher's Status: Active