Introduction to Focused Ion Beam Nanometrology

David C. Cox

$260.95 $208.50

Paperback

Not in-store but you can order this
How long will it take?

Availability Information

We source books from suppliers in Australia and overseas. For books we don't currently have in stock, the time it takes to get them from our suppliers can vary widely - from a few days to a few months - so we check each book with each supplier to determine the expected time it will take to be supplied to us.

We then advise you accordingly. If the time taken to get any book is too long for you, you can let us know and we will cancel or adjust your order, and refund as required.

To find out the anticipated arrival time for specific items prior to ordering, please contact us by phone or email:

Phone +61 2 9264 3111, or 1800 4 BOOKS (1800 4 26657) if outside Sydney:
option 1 Abbey's Bookshop (Crime, History, Science, Kids & more) • info@abbeys.com.au
option 2 Language Book Centre (ESL & Foreign Languages) • language@abbeys.com.au
option 3 Galaxy Bookshop (Sci-fi, Fantasy, Romance, Graphic Novels) • sf@galaxybooks.com.au

QTY:

English

Morgan & Claypool Publishers
30 October 2015

Mensuration & systems of measurement; Scientific equipment, experiments & techniques; Engineering measurement & calibration

Series: IOP Concise Physics

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

By: David C. Cox
Imprint: Morgan & Claypool Publishers
Country of Publication: United States
Dimensions: Height: 254mm, Width: 178mm, Spine: 4mm
Weight: 333g
ISBN: 9781681740201
ISBN 10: 1681740206
Series: IOP Concise Physics
Pages: 104
Publication Date: 30 October 2015
Audience: General/trade , ELT Advanced
Format: Paperback
Publisher's Status: Active

1. Metrology 2. Focused Ion Beam 3. Ion-Solid Interactions 4. Focused Ion Beam - Materials Science Applications 5. Focused Ion Beam Fabrication for Metrology 6. Future Developments

David C. Cox received his PhD from the department of Metallurgy and Materials Science University of Cambridge, UK in 2001. He is currently a senior research fellow at the Advanced Technology Institute, University of Surrey, UK and has been seconded to the National Physical Laboratory, UK as a senior research scientist since 2005. Having a broad background in industry and academia covering many aspects of materials science, physics and electronic engineering, he has published close to 100 articles at the time of writing. Largely associated with both the Quantum Metrology and Materials groups at NPL, his most recent research work has concentrated on the area of using focused ion beam to fabricate devices for quantum metrology. Additionally, he has developed a strong interest in wider aspects of FIB fabrication and fundamental understanding of how focused ion beam can be used to study materials and the errors associated with aspects of the technique.