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Helium Ion Microscopy by Gregor Hlawacek at Abbey's Bookshop,
Helium Ion Microscopy
— —
Gregor Hlawacek Armin Gölzhäuser

Helium Ion Microscopy

Gregor Hlawacek,  Armin Gölzhäuser

$534.95   $428.18

Hardback

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English
Springer International Publishing AG
12 October 2016
Microscopy; Nanotechnology
Series: NanoScience and Technology
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
Edited by:   ,
Imprint:   Springer International Publishing AG
Country of Publication:   Switzerland
Edition:   1st ed. 2016
Dimensions:   Height: 235mm,  Width: 155mm,  Spine: 30mm
Weight:   9.457kg
ISBN:   9783319419886
ISBN 10:   3319419889
Series:   NanoScience and Technology
Pages:   526
Publication Date:  
Audience:   College/higher education ,  Professional and scholarly ,  Further / Higher Education ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active

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