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Guide To Characteristics And Characterization Of Semiconductor Surfaces

Jerzy Ruzyllo (Penn State University, Usa)

$262.95   $210.70

Hardback

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English
World Scientific Publishing Co Pte Ltd
19 May 2025
This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features.

Based on the author's over thirty years of research and graduate advising in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers and industry professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring.
By:  
Imprint:   World Scientific Publishing Co Pte Ltd
Country of Publication:   Singapore
ISBN:   9789811254819
ISBN 10:   9811254818
Pages:   220
Publication Date:  
Audience:   College/higher education ,  Professional and scholarly ,  Primary ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active

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