Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical...

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Kaiying Wang

Green Etching Techniques for MEMS Applications

Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

Kaiying Wang

$236.95 $201.71

Hardback

Forthcoming
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English

CRC Press
19 December 2025

Biochemical engineering; Chemical engineering; Heavy chemicals

Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue need by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.

Key Selling Points:

Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives. Coverage of emerging technologies, including supercritical CO₂, ionic liquids, and gas-phase selective etching. Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing. Detailed industrial case studies highlighting successful implementation and scalability. Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication.

By: Kaiying Wang
Imprint: CRC Press
Country of Publication: United Kingdom
Dimensions: Height: 234mm, Width: 156mm,
ISBN: 9781041144960
ISBN 10: 1041144962
Pages: 168
Publication Date: 19 December 2025
Audience: General/trade , ELT Advanced
Format: Hardback
Publisher's Status: Forthcoming

Chapter 1: Introduction to Green Etching in MEMS Manufacturing Chapter 2: Theoretical Foundations and Mechanisms of Etching Chapter 3: Fluorine-Free Dry Etching for MEMS Chapter 4: Advanced Dry Etching Technologies for MEMS Chapter 5: Wet Etching Alternatives for Green MEMS Processing Chapter 6: Electrochemical Etching for Green MEMS Fabrication Chapter 7: Energy-Efficient Plasma Etching Techniques for MEMS Chapter 8: Industrial Adoption and Future Roadmap for Green MEMS Etching

Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at University of South-eastern Norway from year 2010. Meanwhile, he has participated in several national and European projects related to the micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions (3) Micro- and Nano Systems Technology.