Chemistry of Atomic Layer Deposition

Seán Thomas Barry

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English

De Gruyter
22 November 2021

Inorganic chemistry; Surface-coating technology; Metals technology & metallurgy; Materials science; Electronics engineering

Series: De Gruyter Textbook

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

By: Seán Thomas Barry
Imprint: De Gruyter
Country of Publication: Germany
Dimensions: Height: 240mm, Width: 170mm,
Weight: 214g
ISBN: 9783110712513
ISBN 10: 3110712512
Series: De Gruyter Textbook
Pages: 113
Publication Date: 22 November 2021
Audience: College/higher education , Primary , Primary
Format: Paperback
Publisher's Status: Active

Seán Thomas Barry, Carleton University, Ottawa, Canada.