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Chemistry and Lithography

Uzodinma Okoroanyanwu

$258.95

Hardback

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English
John Wiley & Sons Inc
30 December 2010
Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology.

Part I presents several important chemical and physical principles involved in the invention and evolution of lithography. Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part III investigates several important chemical and physical principles involved in the practice of lithography. Chemistry and Lithography is a useful reference for anyone working in the semiconductor industry.
By:  
Imprint:   John Wiley & Sons Inc
Country of Publication:   United States
Dimensions:   Height: 262mm,  Width: 183mm,  Spine: 53mm
Weight:   1.973kg
ISBN:   9781118030028
ISBN 10:   1118030028
Pages:   896
Publication Date:  
Audience:   Professional and scholarly ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active

Uzodinma Okoroanyanwu is the author of Chemistry and Lithography, published by Wiley.

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