Advancing Silicon Carbide Electronics Technology I: Metal Contacts to Silicon Carbide: Physics, Technology,...

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Konstantinos Zekentes Konstantin Vasilevskiy

Advancing Silicon Carbide Electronics Technology I

Metal Contacts to Silicon Carbide: Physics, Technology, Applications

Konstantinos Zekentes, Konstantin Vasilevskiy

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English

Materials Research Forum LLC
25 September 2018

Mechanical engineering; Materials science; Electronic devices & materials; Other technologies & applied sciences

Series: Materials Research Foundations

Summary
Details

The rapidly advancing Silicon Carbide technology has a great potential in high temperature and high frequency electronics. High thermal stability and outstanding chemical inertness make SiC an excellent material for high-power, low-loss semiconductor devices. The present volume presents the state of the art of SiC device fabrication and characterization. Topics covered include: SiC surface cleaning and etching techniques; electrical characterization methods and processing of ohmic contacts to silicon carbide; analysis of contact resistivity dependence on material properties; limitations and accuracy of contact resistivity measurements; ohmic contact fabrication and test structure design; overview of different metallization schemes and processing technologies; thermal stability of ohmic contacts to SiC, their protection and compatibility with device processing; Schottky contacts to SiC; Schottky barrier formation; Schottky barrier inhomogeneity in SiC materials; technology and design of 4H-SiC Schottky and Junction Barrier Schottky diodes; Si/SiC heterojunction diodes; applications of SiC Schottky diodes in power electronics and temperature/light sensors; high power SiC unipolar and bipolar switching devices; different types of SiC devices including material and technology constraints on device performance; applications in the area of metal contacts to silicon carbide; status and prospects of SiC power devices.

Edited by: Konstantinos Zekentes, Konstantin Vasilevskiy
Imprint: Materials Research Forum LLC
Volume: 37
Dimensions: Height: 229mm, Width: 152mm, Spine: 13mm
Weight: 340g
ISBN: 9781945291845
ISBN 10: 1945291842
Series: Materials Research Foundations
Pages: 250
Publication Date: 25 September 2018
Audience: General/trade , ELT Advanced
Format: Paperback
Publisher's Status: Active