"This book is the Chinese version of the handbook ""Reactive gases, sputtering and magnetrons."" The book discusses all fundamental aspects of reactive magnetron sputtering. It includes chapters on sputtering, magnetron discharge, target processes, film growth and stress evolution. It also provide review question for each chapter. The last chapter is a practical guide."
By:
Diederik Depla Translated by:
董 强 Imprint: Lulu.com Country of Publication: United Kingdom Dimensions:
Height: 229mm,
Width: 152mm,
Spine: 22mm
Weight: 694g ISBN:9781470949464 ISBN 10: 1470949466 Pages: 394 Publication Date:21 December 2022 Audience:
General/trade
,
ELT Advanced
Format:Hardback Publisher's Status: Active