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阴极,反应气体和磁控溅射

Diederik Depla 董 强

$258.95   $207.20

Hardback

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Chinese
Lulu.com
21 December 2022
"This book is the Chinese version of the handbook ""Reactive gases, sputtering and magnetrons."" The book discusses all fundamental aspects of reactive magnetron sputtering. It includes chapters on sputtering, magnetron discharge, target processes, film growth and stress evolution. It also provide review question for each chapter. The last chapter is a practical guide."

By:  
Translated by:  
Imprint:   Lulu.com
Country of Publication:   United Kingdom
Dimensions:   Height: 229mm,  Width: 152mm,  Spine: 22mm
Weight:   694g
ISBN:   9781470949464
ISBN 10:   1470949466
Pages:   394
Publication Date:  
Audience:   General/trade ,  ELT Advanced
Format:   Hardback
Publisher's Status:   Active

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