The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.
Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
By:
Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko Imprint: CRC Press Country of Publication: United Kingdom Dimensions:
Height: 229mm,
Width: 152mm,
Weight: 453g ISBN:9780367401863 ISBN 10: 036740186X Pages: 304 Publication Date:27 September 2019 Audience:
Professional and scholarly
,
Undergraduate
Format:Paperback Publisher's Status: Active
Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.